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POLARIS-F100 spectroscopic ellipsometer and TITAN-M100 wafer micro-void metrology equipment launched
The spectroscopic ellipsometer and wafer micro-void metrology equipment are launched together, completing product coverage across films, critical dimensions and high aspect ratio micro-voids.
2026-10-180
Product Updates
AROSS-S100 angle-resolved scattering OCD metrology equipment launched
The non-contact angle-resolved scattering metrology equipment is launched for films, gratings, nanowires and periodic microstructures, characterizing parameters below the resolution limit of conventional optical imaging.
2026-10-100